A novel noria (water-wheel-like cyclic oligomer) derivative as a chemically
amplified electron-beam resist material
Hiroto Kudo,a Daisuke Watanabe,a Tadatomi Nishikubo,*a Ken Maruyama,b Daisuke Shimizu,b Toshiyuki Kai,b
Tsutomu Shimokawab and Christopher K. Oberc
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