Bringing Order to the World of Nanowire Devices by Phase Shift Lithography
Kittitat Subannajui*, Firat Gder*, and Margit Zacharias
Nanotechnology, Institute of Microsystems Engineering (IMTEK), Albert-Ludwigs-University Freiburg, Georges-Koehler-Allee 103, 79110 Freiburg, Germany
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